MEMS thermopile vacuum sensors effective from 1 millitorr to 1 atm

The upper effective range of traditional Pirani vacuum sensors is capped at around 30 torr. To measure vacuum above this value, an additional piezoresistive or capacitive pressure sensor is required. With their wide effective range, the PVC3000 vacuum sensors released today can measure vacuum to 1 atm without the need for an additional pressure sensor, allowing designers to replace two components with one in vacuum gauges for HVAC and industrial applications.

Using a differential measurement setup (one sensor for reference and one for vacuum measurement), the PVC3000 series allows for automatic internal temperature compensation and eliminates other environmental factors that can cause sensors to drift. The result is excellent repeatability and long-term stability. Available in TO5 (PVC3001) or TO46 (PVC3004) metal cans, the devices offer fast response times under 2ms typical and operate over a -25 to +85°C temperature range.